Conveners
A06.01 Microphone and MEMS transducers: S037
- Petr Honzík (Czech Technical University in Prague)
- Dominik Mayrhofer (Graz University of Technoloy)
A06.01 Microphone and MEMS transducers: S316
- Dominik Mayrhofer (Graz University of Technoloy)
- Petr Honzík (Czech Technical University in Prague)
A06.01 Microphone and MEMS transducers: P430
- Petr Honzík (Czech Technical University in Prague)
- Dominik Mayrhofer (Graz University of Technoloy)
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Nils Wittek (University of Stuttgart, Institute for Micro Integration (IFM))09/09/2026, 08:40A06 Electro-Acoustics
This paper presents a comparative analysis of diaphragm sealing strategies for piezoelectric MEMS loudspeakers, focusing on their impact on sound pressure level (SPL) across the audible frequency range. Effects on actuator design, manufacturing complexity, and reliability are also evaluated. An analytical model is introduced to estimate acoustic leakage, along with a new criterion for defining leakage.
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Romain Liechti (CEA-Leti)09/09/2026, 09:00A06 Electro-Acoustics
MEMS loudspeakers are promising for next generation in ear headphones and hearing aids due to their compact size, low power consumption, and CMOS compatibility. However, their miniaturized structure requires large membrane displacements to achieve sufficient sound pressure levels. In piezoelectric actuators, these displacements often require higher input voltages, and both factors increase...
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Filippo Pietro Perli (Politecnico di Milano)09/09/2026, 09:20A06 Electro-Acoustics
Piezoelectric MEMS speakers are emerging as promising microscale loudspeaker solutions, driven by the increasing demand for smaller, lighter, and more power-efficient audio devices. However, their integration into mass-market products remains challenging, as it requires simultaneously achieving compact size, high acoustic performance, and compatibility with standard fabrication processes.The...
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Dominik Mayrhofer (Graz University of Technoloy)09/09/2026, 09:40A06 Electro-Acoustics
In recent years, loudspeakers that generate audible sound by demodulating an ultrasonic carrier have gained increasing attention. For MEMS applications in particular, this approach offers the advantage of achieving higher sound pressure levels at low frequencies, a regime in which conventional MEMS loudspeakers typically struggle to meet industry requirements. This advantage stems from a...
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Tobias Wilczacki (Graz University of Technoloy)09/09/2026, 10:20A06 Electro-Acoustics
Research on modulated ultrasound microspeakers has been increasing steadily in recent years, with new modulation and actuation techniques being proposed. Such devices are highly integrated, often consisting of multiple moving parts and varying channel widths that require complex simulation to accurately model their behavior. This makes accurate simulations very challenging. In this...
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Aneta Furmanová (Czech Technical University in Prague)09/09/2026, 10:40A06 Electro-Acoustics
Modern MEMS transducers frequently employ electrostatic transduction with perforated plates. Despite the prevalence of these devices, 3D numerical simulations of their structural vibrations remain computationally expensive, and a clear analytical understanding of the underlying physics is often lacking. This paper addresses these challenges by providing analytical approximations for the...
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Petr Honzík (Czech Technical University in Prague)09/09/2026, 11:00A06 Electro-Acoustics
This contribution presents a condenser microphone concept based on a segmented backplate, where directional characteristics are obtained from differences in the mean membrane displacement between electrode segments. The approach enables the realization of bidirectional (figure-of-eight) responses without the need for multiple acoustic paths and provides a flexible basis for synthesizing other...
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Claudia Lenk (Universität Ulm)09/09/2026, 11:20A06 Electro-Acoustics
Bio-inspired acoustic sensors, which integrate functionalities of the human cochlea like frequency decomposition and non-linear amplification directly in the sensor itself, offer a great potential to improve speech-in-noise processing and energy-efficiency for embedded systems and hearing aids. Particularly, the dynamic MEMS cochlea demonstrated advantages regarding robustness of sound...
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Karl Grosh (University of Michigan)09/09/2026, 11:40A06 Electro-Acoustics
Hearing aids and cochlear implants restore auditory perception for many patients but remain limited by environmental susceptibility and restricted daily use. Completely implantable auditory prostheses promise continuous, unobtrusive operation. However, their widespread adoption is constrained by the lack of implantable acoustic sensors that are simultaneously low-noise, mechanically robust,...
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Petr Honzík (Czech Technical University in Prague)09/09/2026, 15:00A06 Electro-Acoustics
Nonlinear distortion is an inherent limitation of condenser microphones, originating primarily from the nonlinear change of capacitance between the diaphragm and the backplate. In single-backplate designs, this effect leads predominantly to second-order harmonic distortion, which can dominate the total harmonic distortion at high sound pressure levels. In contrast, dual backplate...
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