8–12 Sept 2026
Europe/Vienna timezone

Eigenfrequencies of Perforated Plates in MEMS Transducers: an Analytical Approximation

FA2026/67
9 Sept 2026, 10:40
20m
Saal 11B (Messe Congress Graz)

Saal 11B

Messe Congress Graz

Speaker

Aneta Furmanová (Czech Technical University in Prague)

Description

Modern MEMS transducers frequently employ electrostatic transduction with perforated plates. Despite the prevalence of these devices, 3D numerical simulations of their structural vibrations remain computationally expensive, and a clear analytical understanding of the underlying physics is often lacking. This paper addresses these challenges by providing analytical approximations for the eigenfrequencies of clamped non-perforated and perforated square plates.Using symbolic regression, we provide analytical approximations while avoiding the instabilities associated with high-degree polynomials. For perforated plates, the eigenfrequency is modeled as a normalized discrepancy to the solid case using a rational function characterized by only two geometry-dependent parameters. This sparse, interpretable form facilitates the subsequent derivation of the effective Young’s modulus and effective plate density. To the best of our knowledge, this is the first work to employ symbolic regression for the analytical approximation of perforated plate eigenfrequencies.

Authors

Aneta Furmanová (Czech Technical University in Prague) Petr Honzík (Czech Technical University in Prague) Viktor Hruška (Czech Technical University in Prague) Pierrick Lotton (Laboratoire d’Acoustique de l’Universite du Mans (LAUM), UM)

Presentation materials