Speaker
Nils Wittek
(University of Stuttgart, Institute for Micro Integration (IFM))
Description
This paper presents a comparative analysis of diaphragm sealing strategies for piezoelectric MEMS loudspeakers, focusing on their impact on sound pressure level (SPL) across the audible frequency range. Effects on actuator design, manufacturing complexity, and reliability are also evaluated. An analytical model is introduced to estimate acoustic leakage, along with a new criterion for defining leakage.
Authors
Nils Wittek
(University of Stuttgart, Institute for Micro Integration (IFM))
Anton Melnikov
(Bosch Sensortec GmbH)
André Zimmermann
(University of Stuttgart, Institute for Micro Integration (IFM))